EQ-99X-FC LDLS

High Brightness, Broadband Light Source with Fiber-Coupled Output

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The EQ-99X-FC LDLS is a high radiance, broadband light source with integrated collection optics built for systems with fiber connections.

The EQ-99X-FC’s high-performance ellipsoidal collector maintains the ultra-high brightness and spatial stability across the broad spectrum, from 190 nm to 2500 nm, and efficiently couples into small diameter optical fibers.

Proprietary Fiber-Protection Technology™ enhances DUV performance and significantly extends fiber life by reducing the effects of solarization. Utilizing a patented laser-driven bulb technology* and ultra-clean construction, the EQ-99XFC is ideal for applications requiring ultra-long lamp life and advanced illumination.

Manual  |  Datasheet

Wavelength: 170nm – 2500nm
Plasma Size (FWHM)* 100 μm X 180 μm
Numerical Aperature: 0.47 NA
Bulb Lifetime: 10,000 hours
Laser Class: Class 1 (IEC 60825: 2014)

*Average

Semiconductor Metrology
Sensor Calibration and Testing
Scientific Development

Semiconductor Metrology
Sensor Calibration and Testing
Scientific Development

Spectral Radiance Comparison 

99X-FC Spectral radiance

Resources 

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App Notes/Articles/Tech Papers

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